- Measurement resolution: 6½ digits
- Current measurement: 0.01 fA - 20 mA
- Minimum range: 2 pA
- Resistance measurement: Up to 10 PΩ
- Voltage measurement: 1 μV - 20 V
- Input resistance > 200 TΩ
- Charge measurement: 1 fC - 2 μC
- Temperature measurement √
- Humidity measurement √
- Voltage source: Up to ±1,000 V
- Minimum resolution: 700 μV
- Maximum reading rate: 20,000 rdg/s
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