Model | QV ACCEL 808 | QV ACCEL 1010 | QV ACCEL 1212 | QV ACCEL 1517 | ||||
Optical system | PRO | PRO3 | PRO | PRO3 | PRO | PRO3 | PRO | PRO3 |
Standard Machine | 363-315 | 363-316 | 363-335 | 363-336 | 363-355 | 363-356 | 363-375 | 363-376 |
Tracking Auto Focus device | 363-321 | 363-322 | 363-341 | 363-361 | 363-361 | 363-362 | 363-381 | 363-382 |
Measuring range (XxYxZ) | 800x800x150 mm | 1000x1000x150 mm | 1250x1250x100 mm | 1500x1750x100 mm | ||||
Resolution of scale / Scale type | 0.1 µm/Linear Encoder | |||||||
Accuracy E1X, E1Y | (1.5+3L/1000) µm | (2.2+3L/1000) µm | ||||||
Accuracy E1Z | (1.5+4L/1000) µm | (2.5+5L/1000) µm | ||||||
Accuracy E2XY | (2.5+4L/1000) µm | (3.5+4L/1000) µm |
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