Model No. | QV ACCEL808 | QV ACCEL1010 | ||
Order No. | QV-A808P1L-D | QV-A1010P1L-D | ||
Measuring range (XxYxZ) | 800x800x150 mm | 1000x1000x150 mm | ||
Observation unit | PT1X-2X-6X | |||
Imaging device | B&W CCD (1/2 inch) | |||
Accuracy | E1X, E1Y | (1.5+3L/1000) µm | ||
E1Z | (1.5+4L/1000) µm | |||
E2XY | (2.5+4L/1000) µm | |||
Repeatability | Short dimensions | XY axis | 3σ=0.2 µm | |
Long dimensions | 3σ=0.7 µm | |||
Tracking auto focus device | Optional |
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