| Model No. | QS-L2010Z/AFB | QS-L3017Z/AFB | QS-L4020Z/AFB |
| Drive Method | Autofocus equipped, X-, Y-axis: manual, Z-axis: motor-operated | ||
| Optical magnification | Zoom 0.5X to 3.5X (8 steps) | ||
| Total magnification | 26X to 180X (8 steps) | ||
| Measuring range (XxYxZ) | 200x100x150 mm | 300x170x150 mm | 400x200x150 mm |
| Resolution | 0.1 µm | ||
| Scales | Linear encoder | ||
| Image detection method | Color CCD camera | ||
| IIlumination | Co-axial Light, Transmitted Light, Ring Light | ||
| Indication accuracy X-axis, Y-axis | (2.5+20L/1000)µm | ||
| Indication accuracy Z-axis | (5.0+6L/1000)µm | ||
| Max. stage loading | 10 kg | 20 kg | 15 kg |
| Diamensions (WxDxH) | 624x705x722 | 682x852x837 mm | 757x867x837 mm |
| Mass | Approx. 66kg | Approx. 134kg | Approx. 140kg |
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