| Model No. | SJ-411 | SJ-412 | |||
| Order No. | mm | 178-580-11 | 178-580-12 | 178-582-11 | 178-582-12 |
| inch/mm | 178-581-11 | 178-581-12 | 178-583-11 | 178-583-12 | |
| Measuring range | X axis | 25 mm | 50 mm | ||
| Z axis (detector) | 800 µm, 80 µm, 8 µm Up to 2,400 µm when using an optional stylus. | ||||
| Detector | Detection method | Differential inductance | |||
| Resolution | 0.01 µm (800 µm range), 0.001 µm (80 µm range), 0.0001 µm (8 µm range) | ||||
| Stylus tip shape (Angle/Radius) | 60°/2 µm | 90°/5 µm | 60°/2 µm | 90°/5 µm | |
| Measuring force | 0.75 mN | 4 mN | 0.75 mN | 4 mN | |
| Radius of skid curvature | 40 mm | ||||
| Measuring methods | Skidless/Skidded (switchable) | ||||
| Drive unit (X axis | Measuring speed | 0.05, 0.1, 0.2, 0.5, 1.0 mm/s | |||
| Drive speed | 0.5, 1, 2, 5 mm/s | ||||
| Straightness | 0.3 µm/25 mm | 0.5 µm/50 mm | |||
| Up/down inclination unit | Vertical trave | 10 mm | |||
| Inclination adjustment angle | ±1.5° | ||||
| Applicable standards | JIS 1982/JIS 1994/JIS 2001/ISO 1997/ANSI/VDA | ||||





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