| Model No | CS-3300S4 | CS-3300H4 | CS-3300W4 | CS-3300L4 | CS-3300S8 | CS-3300H8 | CS-3300W8 | CS-3300L8 | |
| Measuring range | X axis | 100 mm | 200 mm | ||||||
| Z1 axis | 5 mm (±2.5 mm in horizontal situation) | ||||||||
| Straightness (when the X axis is horizontal) | 0.2 µm/100 mm | 0.8 µm/200 mm | |||||||
| Accuracy (20 °C) | X axis | ±(0.8+0.01L) µm L = Measurement Length (mm) | (0.8+0.015L) µm L = Measurement Length (mm) | ||||||
| Z1 axis (detector unit) | ±(1.5+|2H|/100) µm H = Measurement height from the horizontal position (mm) | ||||||||
| Detector (Z1 axis) | Detection method | Differential inductance | |||||||
| Measuring force | 0.75 mN | ||||||||
| (Stylus tip) Standard | Tip radius 2 µm, Tip angle 60°, Diamond (surface roughness/contour) | ||||||||
| Stylus tip) Cone | Tip radius 25 µm, Tip angle 30°, Sapphire (contour) | ||||||||
| Stylus up/down | Available (stoppable at mid-stroke if required) | ||||||||
| X-axis inclination angle | ±45° | ||||||||
| Z2-axis (column) travel range | 300 mm | 500 mm | 700 mm | 300 mm | 500 mm | 700 mm | |||
| Base size (W×D) | 600×450 mm | 1000×450 mm | 600×450 mm | 1000×450 mm | |||||
| Base material | Granite | ||||||||





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