| Model No. | SV-C4500CNC | ||
| X1 axis (Drive unit) | Measuring range | 200 mm | |
| Resolution | 0.05 µm | ||
| Scale type | Reflective-type linear encoder | ||
| Contour | Straightness | 2 µm/200 mm | |
| Accuracy (20 oC) | ±(0.8+4L/200) µm L: Measuring length (mm) | ||
| Surface roughness | Straightness | 0.5 µm/200 mm | |
| Z1 axis (Detector) | Contour | Measuring range | 60 mm (±30 mm from the horizontal) |
| Resolution | 0.02 µm | ||
| Scale type | Arc | ||
| Accuracy (20 oC) | ±(0.8+|2H|/100) µm H: Measuring height from horizontal position (mm) | ||
| Surface roughness | Measuring range | 800 µm/80 µm/8 µm | |
| Resolution | 0.01 µm/0.001 µm/0.0001 µm | ||
| Z2 axis (Column) | Drive range | Specification is selectable from 300 mm or 500 mm | |
| Resolution | 0.05 µm | ||
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